Fabrication of sub-wavelength structure and it''s application by prism immersion interference lithography technology
碩士 === 國立中央大學 === 光電科學研究所 === 100 === The Lloyd’s mirror interference system is the most common for fabrication technology of the periodic structure in recent years, Comparison of two beam and Lloyd’s mirror (single beam) exposure systems, advantage of single beam is optical path set up simply, st...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/70977884916638735509 |