Electrochemical deposition of ZnO nano structures on a copper micro-column

• Main Authors: Yao-Tien Tseng, 曾耀田
• Other Authors: Jing-Chie Lin
• Format: Others
• Language: zh-TW
• Published: 2012
• Online Access: http://ndltd.ncl.edu.tw/handle/25244065789594120055

碩士 === 國立中央大學 === 材料科學與工程研究所 === 100 === The micron-size metal columns, in an average diameter of 80 μm, have been prepared from a bath of copper sulfate by a novel method. This new technique of micro-electroplating system guided continuously by real-time imaging is different from the traditional technology used IC fabrication and MEMS process. The copper micro column is suitable for electrodepositing ZnO structure due to their smooth surface and fine structure. In this work, electrodeposition of nano ZnO homogeneously coated on the Cu-micro-column by controlling the experimental parameters and carried out with a three-electrode electroplating system was investigated. Surface morphology of the nano ZnO coating was determined by the experimental parameters such as deposition potential, bath composition and deposition time. By means of potentiodynamically cathodic polarization, we found this electroplating at -0.9 V (vs. Ag / AgCl) revealed a limiting current to grow ZnO nano-rod in good surface morphology through examination by the scanning electron microscope (SEM). With increasing the deposition time from 10 minutes to 20 minutes, a dense ZnO film was deposited and grown in non-directions growth. The morphologies of ZnO nano-rod tended to form in hexagonal nano-rod with increasing the H2O2 concentration for 5 mM to 20 mM. The X-Ray Diffraction confirms that all the ZnO prepared in differernt H2O2 concentration were wurtzite textured on (101).The deposited ZnO nano rods have been studied by electron spectroscopy for chemical analysis to identify the chemical bonding in the different H2O2 concentration. They consisted of major Zn(OH)2 covered on the ZnO deposited with the presence of concentrated H2O2. Tin-doped ZnO was examined through energy dispersive spectrometer (EDS) and ESCA to confirm prepared and the tin atoms into ZnO with the electrochemical deposition. The XRD analysis revealed no other impurities phase such as the existence of metal tin and tin dioxide (SnO2), doping by the electrochemical deposition has been proven to be a feasible approach.