Improvement of True/False Defects Detection Using Diffuse Reflection Inspection System in the Cell Process of LCD

• Main Authors: Sun, Shih-Ying, 孫世英
• Other Authors: Cheng, Stone
• Format: Others
• Language: zh-TW
• Published: 2011
• Online Access: http://ndltd.ncl.edu.tw/handle/00545852688024653575

碩士 === 國立交通大學 === 平面顯示技術碩士學位學程 === 100 === In this research, we will improve the overkill which is the particles in the environment fall on the panel , and make Cell test AOI judgment be not correct in the LCD Cell process .And the senseless overkill will make panel repair and waste machine manufacture. This research forsakes clean machine by operator with tradition , and use different source to light up the panel. When the true defect in Cell and the particles on the panel surface lit , it will be different diffuse reflection. And then ,we use image compare to part the false defect cause by particle , and record the coordinates to array. If there is the same coordinate in particle array we meet during the others pattern checking process , it will be false defect. According the experiment , it will work . The infrared rays equipments will decrease the AOI overkill efficaciously , and the yield increase 22% , it will cost down NTD 5,500,000 every year.