The Study of the Failure Mode for Abnormal Events of the Local Scrubber – Taking a Semiconductor Factory as an Example
碩士 === 國立交通大學 === 工學院產業安全與防災學程 === 100 === Semiconductor plants often need to use large quantities of dangerous and harmful chemicals during the manufacturing process, and since these chemicals may be flammable, explosive, toxic or other highly reactive dangerous substances, they tend to cause a cer...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/20369435207308374662 |