| Summary: | 碩士 === 國立交通大學 === 工學院產業安全與防災學程 === 100 === Semiconductor plants often need to use large quantities of dangerous and harmful chemicals during the manufacturing process, and since these chemicals may be flammable, explosive, toxic or other highly reactive dangerous substances, they tend to cause a certain degree of harm to the human body and the environment, both directly and indirectly. A survey was conducted by this study in a semiconductor plant on abnormal accidents from 2006~2010, the local scrubber equipment was found to experience the highest rate, 25%, of the 252 incidents that occurred. Furthermore, when the abnormal accidents of the local scrubber were analyzed and investigated, gas leakage accidents were found to account for 62% of the events; liquid leakages, 36%; and detector and sensor actions caused by smoke, 2%. Pipeline plugging accounted for the highest rate of gas leakage accidents, at approximately 41%; internal component malfunctioning, including water supply solenoid valve, drainage pump and fluid level gauge failures, etc., accounted for the highest rate, approximately 30%, of liquid leakage accidents. When various abnormal components were analyzed by using Failure Mode and Effect Analysis (FMEA), the failure factor caused by gas leakage accidents was found to cause a total of 36 events, with air intake pipe blockage accounting for the highest hourly failure rate of 7.5×10-4. A total of 27 failure factors were found in liquid leakage accidents, with the highest hourly failure rate of 3.4×10-4 being caused by water supply solenoid valves; a total of 3 failure factors were found in smoke accidents, with the highest hourly rate of 4.6×10-5 caused by air inlet pipe blockage and operation management faults. The prevention and improvement measures were then employed for various failure factors, whose failure rates were compared with those before the improvements. The hourly failure rate of failure factors in gas leakage accidents caused by pipeline blockage fell from 7.5×10-4 to 3.4×10-4. In the failure factor of liquid leakage accidents, the hourly failure rate caused by water supply solenoid valve malfunctioning dropped from 3.4×10-4 to 2.3×10-4 ; and in the failure factor of smoke accidents, the hourly failure rate caused by pipeline blockage plummeted from 4.6×10-5 to zero. Therefore, administrative control and sectional engineering improvements were shown to yield effective results. This study also investigated the safety interlock design of the burn-wet scrubber system and found that it required at least five safety devices on the interlock function of hardware alone. Finally, the domestic and overseas SEMI and NFPA safety guidelines were studied to establish the standard norms on regional washing
equipment, which serve as a reference for relevant industry sectors.
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