Improvement on Using Pull-in Voltage to Detecting Residual Stress of Curled Micro Cantilever Beam
碩士 === 國立交通大學 === 機械工程學系 === 100 === Residual stress due to the fabrication process might cause the deformation of MEMS devices. Using pull-in voltage to determine residual stress is possible to directly detect residual stress on MEMS fabrication process. In previous studies using pull-in voltage to...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/80136932101757179177 |