A Rotation-Invariant Similarity Measure for Wafer Bin Maps Clustering and Classification

碩士 === 國立交通大學 === 電控工程研究所 === 100 === There are hundreds of steps in a semiconductor manufacturing process. If any problems occur in these steps, it might reduce the yield of the wafers. To determine the causes of the yield loss, visual recognition of wafer bin map patterns by experienced engineers...

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Bibliographic Details
Main Authors: Chou, Shu-Yuan, 周恕緣
Other Authors: Jou, Chi-Cheng
Format: Others
Language:zh-TW
Published: 2011
Online Access:http://ndltd.ncl.edu.tw/handle/24125777265791081098