CoNiMnP-AAO Hard Magnetic Nanocomposite Film for MEMS Applications

• Main Authors: Lin, Jian-Ruei, 林建睿
• Other Authors: Cheng, Yu-Ting
• Format: Others
• Language: en_US
• Published: 2011
• Online Access: http://ndltd.ncl.edu.tw/handle/00510049773810574918

碩士 === 國立交通大學 === 電子研究所 === 100 === In this thesis, the arrays of CoNiMnP nanowires were grown by employing the DC electrodeposition technique with an anodic alumina oxide (AAO) templates to form a CoNiMnP-AAO nanocomposite. The nanowires are controlled to have different diameter (170 nm, 230 nm) and length (12, 23, 36m) in order to investigate the magnetic properties. For the electroplated nanocomposite with the magnetic wire with 170 nmin diameter and 23um in length, the coercivity of out-of plane of the nanocomposite is 2509 Oe with the retentivityof 3936 Gauss, and the energy density is 14.3 kJ/m3. As we know, the hard magnetic nanocomposite film has the highest vertical anisotropy and energy density in comparison with the-state-of-the-arts CoNiMnP film, and the magnetic characteristics and related low temperature deposition process make itself suitable for many magnetic MEMS devices applications.