The Study of Oxidation Characteristics of High Sensitivity Stacked SiGe/Si-On-Insulator Nanowire under Different Oxidation Conditions
碩士 === 國立交通大學 === 電子研究所 === 100 === Recently, silicon nanowires (SiNWs) have been extensively studied and discussed in bio-sensor applications, and considered as one of the most promising candidate for sensor devices. We successfully fabricated silicon germanium nanowires (SiGeNWs), and confirmed th...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/14849709065310884582 |