Improved performance and reliability of MIC LTPS-TFTs using simply chemical oxide and drive-in nickel induced crystallization
博士 === 國立交通大學 === 材料科學與工程學系 === 100 === Ni-metal-induced crystallization (MIC) of amorphous Si (α-Si) has been widely employed to fabricate low-temperature polycrystalline silicon (LTPS) thin-film transistors (TFTs). However, the high leakage current is an issue of MIC TFTs because Ni impurities...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2011
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/99948106182205761464 |