Feasibility of On-site H2/N2 Mixing Gas System in Semiconductor Industry

• Main Authors: Tsai, Tsung Huang, 蔡宗晃
• Other Authors: Bai, Hsun ling
• Format: Others
• Language: zh-TW
• Published: 2012
• Online Access: http://ndltd.ncl.edu.tw/handle/28147603445071668090

碩士 === 國立交通大學 === 工學院永續環境科技學程 === 100 === The third Conference of the Parties to the United Nations Framework Convention on Climate Chang was held in Kyoto in 1997, it was proposed to reduce greenhouse gas emissions from industrialized countries by at least 5% during the period of 2008-2012 on a base year of 1990. In order to reduce the carbon emission, the semiconductor industry should re-assess the environmental cost of the gas supply chain. This study intends to study on the cost-effectiveness of on-site supply system of 4%H2/N2. The parameters being evaluated include the investment cost, the emission reduction of greenhouse gases, human resources efficiency, reduction of the alarm frequency as well as the hazard and operability Studies. The results indicated that under the 80K monthly wafer loaded production case and 20 years depreciation period (the annual gas consumption was 4.343 million cubic meters), the net present value was NT$ 5.06021 billion, the 10 and 20-year internal rate of return were 110.80% and 110.89%, The discounted payback period was 0.94 years. In addition, the annual savings on human resources was 86.4%, the alarm frequency was reduced by 84.2%, and the carbon emission reduction amount was 32.4 metric tons. According to the results of the assessment of hazard and operability studies, the on-site mixing gas system has a total of 5 deviation items, which is relatively less than the 7 items when using the bundle system. This is mainly due to that the on-site system doesn’t require manpower to replace the cylinder; hence it can reduce the likelihood of risks as well as risk levels.