Comparison of PFCs emission estimation methods and reduction potential from semiconductor industry
碩士 === 國立交通大學 === 工學院永續環境科技學程 === 100 === In recent years, the global climate change caused by the greenhouse gas emission has gained worldwide attention. The CVD and Dry Etch process in semiconductor industry use a significant amount of PFCs (Perfluorinated Carbons) gases. They are high global warm...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/56554053869823428955 |