| Summary: | 碩士 === 國立成功大學 === 奈米科技暨微系統工程研究所 === 100 === Patterned electrically conductive nitrogen doped nanocrystalline diamond (NDD) sandwiched between two insulating intrinsic nanocrystalline diamond (NCD) films severs as an all-carbon resistive heater. Biocompatibility, chemical inertness, low wear rate and high hardness of diamond help make this class of heaters useful for highly demanding applications such as heaters in corrosive chemicals and electrosurgical tools for medical practice.
NDD and NCD are synthesized by microwave plasma enhanced chemical vapor deposition (MPECVD) in Ar/CH4/N2 and Ar/CH4 gas mixtures, respectively. NDD and NCD serve as high-density diamond nuclei for the growth of NCD and NDD over layers. By patterning the shape of the NDD film for allowing an electrical current to flow through, NDD resistive heater is fabricated and subsequently encapsulated by a NCD over layer.
Raman scattering, scanning electron microscope, and high-resolution transmission electron microscope are applied to characterize NDD and NCD grown on each other. Infra-red thermometer is applied to map the temperature profile across the diamond heater and confirm satisfactory operation.
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