Research of Nanocrystalline Silicon Oxide Thin Film by Low-Energy Ion-Beam Assisted Sputtering
碩士 === 國立成功大學 === 電機工程學系碩博士班 === 100 === This study took low-energy ion-beam assisted sputtering (IBAS) system to synthesize Si nanocrystals in silicon rich oxide (SRO) film. Films were deposited by sputtering first and ion beam bombardment was conducted later to control the film properties. By...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/66804843358392690021 |