Ga2O3 -based UV Sensor Devices
碩士 === 國立成功大學 === 微電子工程研究所碩博士班 === 100 === The main goal of this dissertation is the fabrication and analysis of Ga2O3-based ultraviolet (UV) sensor devices. The Ga2O3 thin film was grown on sapphire substrate by Radio-Frequency Magnetron Sputter technique with thermal annealing treatment to improve...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/61617893481158220438 |