| Summary: | 碩士 === 國立成功大學 === 材料科學及工程學系碩博士班 === 100 === The purpose of the project is to improve the design and fabrication of the novel “Vehicle probe” for scanning thermal microscope. The vehicle probe composes of a cantilever, a micro metal heater, and a tip base which is integrated into the cantilever by mechanical clamping or adhesive methods. In order to optimize each section of the probe, different materials were employed.
The cantilever is made of single crystal silicon and manufactured by MEMS process, while the resistive metal heater is made of either electroless nickel-phosphorus, E-beam evaporated Aluminum, or focus ion beam deposited tungsten, and defined via lift-off process. When using the thermal probe, users have to compromise between the resolution of topography and thermal image. Therefore, by virtues of its outstanding thermal conductivity and wear resistance against Si and any other materials, the single crystal diamond is the choicest tip material, as great potential lies not only in the field of thermal analysis but also in micro-thermal machining.
The analyses of my processed results show that as-deposited Ni-P is meta-stable. Its structure and electrical properties change according to the temperature. It is noted that the annealing process needs to be applied before the high temperature operations. This experiment results indicate that when the temperature is elevated, the deposits transformed into stable fcc Ni and Ni3P phases. Also, after four hours of annealing at 400℃, the Ni-P deposit will stabilize at below 200℃.
The cantilevers integrated with micro metal heater was heated, then calibrated by melting standard method and infrared thermometry. The maxima achievable and controllable temperature of the heater is to be at least 300℃. Finally, the diamond tip was successfully glued onto the cantilever and a preliminary scan result was obtained.
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