The Optimal Dispatching Policies for Multi-Product Semiconductor Manufacturing Networks with Drifting Disturbances
碩士 === 國立成功大學 === 化學工程學系碩博士班 === 100 === Semiconductor manufacturing industry is a technology and capital-intensive industry. As feature sizes shrink and wafer sizes increase, the manufacture should use intricate run-by-run control methods to improve the product quality and tools utilization of any...
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| Format: | Others |
| Language: | zh-TW |
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2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/91981049704896488822 |