Dressing Characteristics of Novel Diamond Disks and its Effect on Wafer Performancee

碩士 === 國立勤益科技大學 === 機械工程系 === 100 === A novel diamond disks divided five types (CDD, BODD-12 and 24-broken shapes, BODD-12 and 24-complate shapes).Expectally, Ceramic diamond disks (CDD) is using by high temperature and high pressure, irregular arrangement of diamonds set in the glass ceramicand int...

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Bibliographic Details
Main Authors: Jun-Lin Zeng, 曾俊霖
Other Authors: Dr.Ming-Yi Tsai
Format: Others
Language:zh-TW
Published: 2012
Online Access:http://ndltd.ncl.edu.tw/handle/02290220562454036352
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Summary:碩士 === 國立勤益科技大學 === 機械工程系 === 100 === A novel diamond disks divided five types (CDD, BODD-12 and 24-broken shapes, BODD-12 and 24-complate shapes).Expectally, Ceramic diamond disks (CDD) is using by high temperature and high pressure, irregular arrangement of diamonds set in the glass ceramicand into the epoxy resin basis can complate. BODD diamond disks,first steps is using molten nickel alloy joined metal and putting on circular board, and then use the template to the diamond predetermined irregular arrangement of the brazing metal circular board, last completed 12 of 24 combinations type diamond disksfabrication of the device. The experimental results showed that the ceramic diamond disks(CDD)have more completediamond crystal shapes and distribution with better leveling and more constant, so can increase effectives working diamond grits, get more better wafer non-uniformity and raise dressing performance.