Applications of Thin Film Optical Measurement System and Measurement System Analysis
碩士 === 明志科技大學 === 機電工程研究所 === 100 === Optical inspection technology is often applied in optical components, thin-film materials, and measurements of the surface roughness of metal surface processing. This study aimed to develop an optical measurement system with high measurement speed and high accur...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2012
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Online Access: | http://ndltd.ncl.edu.tw/handle/72576120143223212122 |