High efficiency silicon based thin film solar cells prepared by very high frequency plasma enhanced chemical vapor deposition
碩士 === 明道大學 === 材料科學與工程學系碩士班 === 100 === In this study, the pin single-junction amorphous and microcrystalline silicon tandem thin film solar cells were prepared by very high frequency plasma enhanced chemical vapor deposition. Various process parameters and cell structures influencing on the perfor...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/x29awa |