| Summary: | 碩士 === 明道大學 === 材料科學與工程學系碩士班 === 100 === In this study, a method of changing magnetic field and structure applied in dynamic magnetic cylindrical cathodic arc can control the field magnetron, and also can make the arc melt uniformly on the target to improve some disadvantages resulted from traditional arc source. The novel cylindrical structure can be used in big area process. In this study were divided into two parts, first, the traditional four-inch target and the cylindrical target to compare their mechanical properties, including: Hardness, Deposition rate, Adhesion and Surface roughness. The second part of the depositing TiO2 for further fabricating dye-sensitized solar cells (DSSC). The main process is to vary the partial pressure and friction of oxygen for depositing TiO2 films on different substrates of SS304 stainless and silicon wafer, finally improve the crystallization, microstructure and light-catalysis to fabricate the DSSC. In this experiment Field Emission Scanning Electron Microscope (FESEM) is used to observe the morphology on the surface and cross-section and X-ray Diffraction (XRD) is used to observe the change of crystallization phases. And the X-ray photoelectron spectroscopy (XPS) measurements film elements.
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