Effect of the Process Conditions on the Structure and Properties of Nanocrystalline Diamond/Amorphous Carbon films

• Main Authors: Yen-Chun Tu, 杜言濬
• Other Authors: Chun-Ming Liu
• Format: Others
• Language: zh-TW
• Published: 2012
• Online Access: http://ndltd.ncl.edu.tw/handle/19615325445861461617

碩士 === 龍華科技大學 === 工程技術研究所 === 100 === Nanodiamond/amorphous carbon films was composed of the nanoscale diamond crystals and amorphous carbon. The grain size of 5-100 nm, it has smooth surface. In this study, we changed the work process to grown the two step , At first, we have grown a set of samples in CH4/N2/Ar atmosphere by fixing CH4 1 % and varying N2 from 1-9 % for 1hour deposition. Then, we choose CH4/N2/Ar (1:5:94) as the first step growth condition for 1 hour and change the gas composition to CH4/H2/Ar. CH4 was still kept to 1 % and H2 was varied from 5-25 %. And discusses its morphology and structure, physical properties and the feasibility of the Hemocompatibility. The results indicate that first step N2-5% of the roughness up to 58 nm, the roughness of the second step was increased when H2 decreased, that from 90nm increased to 50 nm. The morphology was from island to layered of the second step, the (111)、（220）diamond was not only found from the TEM ring pattern analysis but also found the (111) diamond in X-ray diffraction analysis, the raman spectroscopy analysis results have the NCD、MCD peak. Whether the specimen influence the activated partial thromboplastin time assay and prothrombin time assay of the blood-coagulation cascade of the intrinsic pathway and extrinsic pathway test results. The specimen and control group are not significantly different.