Theoretical Analysis Of Surface Acoustic Waves Propagation Characteristics Using ZnO /AlN /Diamond And AlN / ZnO /Diamond Structures

• Main Authors: Huang, Xiaogeng, 黃孝耕
• Other Authors: Ro, Ruyen
• Format: Others
• Language: zh-TW
• Published: 2012
• Online Access: http://ndltd.ncl.edu.tw/handle/95932853757982808034

碩士 === 義守大學 === 電機工程學系 === 100 === This thesis, the finite element method analysis software Comsol Multiphysics are employed to evaluate propagation characteristics of surface acoustic waves devices (SAW)in piezoelectric composite structures of Diamond, AlN and ZnO. In this study , SAW characteristics in (100)ZnO/(100)AlN/Diamond, (002)ZnO/(002)AlN/Diamond, (100)AlN /(100)ZnO/Diamond, and (002)AlN/(002)ZnO/Diamond, such as phase velocity, coupling coefficient, and temperature coefficient of delay for the second mode are analyzed. These coupling-of-mode parameters uses Matlab software to draw Contour maps are presented versus the thickness of the piezoelectric films. The best piezoelectric composite structure is then be used to analyse the effects of the Aluminum electrodes on SAW propagation characteristics.