Using Candle Filter (CF) for recovery of strippers in the exhaust of TFT-LCD industry
碩士 === 弘光科技大學 === 環境工程研究所 === 100 === Recycle and recovery of strippers from process exhaust are important issues for high-tech industries, such as semiconductor manufacturing, foundry and the color thin-film liquid crystal display manufacturing. Stripper condenser (SC) is one of the most used metho...
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Format: | Others |
Language: | zh-TW |
Online Access: | http://ndltd.ncl.edu.tw/handle/48873977083935947274 |