Fracture toughness test of thin films in liquid by the mixed-mode double cantilever beams
碩士 === 逢甲大學 === 機械工程學所 === 100 === In this thesis, four different types of thin film multi-layers are fabricated on 4-inch wafers by the MEMS fabrication technique. These 4 multi-layers are Si3N4/SiO2/Si, Si3N4/Si, PZT/Pt/Ti/Si and PZT/Al/Si. The specimen size is 40mm×5mm. Force testing machine with...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/87762687123334680177 |