Study on gas sensor of cobalt oxide film through electro-deposition

• Main Authors: yu-cheng chang, 張祐誠
• Other Authors: Jen-Bin Shi
• Format: Others
• Language: zh-TW
• Published: 2012
• Online Access: http://ndltd.ncl.edu.tw/handle/33004922468171311437

碩士 === 逢甲大學 === 電子工程所 === 100 === In this Cobalt thin films were firstly deposited on glass substrates by using magnetron sputtering as a conductive layer and then the cobalt oxide nanostructures were prepared onto cobalt thin film substrates by electrodeposition method from an aqueous solution. The electrodepositon device was carried out in a three electrodes system, in which the cobalt thin film substrates were used as the working electrode and the electrolyte contained cobalt nitrate Co(NO3)2‧6H2O aqueous solution. The crystal structures films were identified by X-ray diffraction (XRD). The surface morphology, length and thickness of the films were determined by using a field emission scanning electron microscopy (FESEM) and use the energy dispersive spectrometer (EDS) to analysis cobalt oxide thin films chemical composition,and gas sensor characteristics.