| Summary: | 碩士 === 逢甲大學 === 資訊電機工程碩士在職專班 === 100 === Due to that the semiconductor manufacturing process is needed to continuously minimize and to increase the product capacity, it leads to the semiconductor manufacturing procedures to be adjusted and the equipment to be continuously expanded. Therefore for reaching the requirement, it is necessary to improve the transmission performance and utilization of automated material handling system. For this improvement, it takes a lot of manpower, resources and time to adjust the system and to assess the response of the countermeasures. The current transport system is to use the rationalized car (OHS, OHT) number, track design and dispatching methods for its research topic. Although it can resolve the issue on the unity of dispatching, a reasonable solution of scheduling the actual car is required.
In this research, the current 12-inch wafer manufacturing of automated material handling system (AMHS) is the research subject which includes the use of data mining prediction of flow conditions, wafer manufacturing simulation and analysis of over-head hoist shuttle (OHS) and over-head hoist transportation (OHT) in the best of rail car number, a reasonable distribution of transport systems for satisfying the actual conditions of automated material handling system. By means of the simulation results in comparison with the validation data of actual production environment, the simulation system of this study has a agreement of about 90% to the actual transport system. For this simulation result of the OHS, OHT rail car with a number of optimization, it provides the automated material handling system as a reference for improving the performance.
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