Broadband Complex Permeability Characterization of Magnetic Films Using Microstrip Line Method

碩士 === 逢甲大學 === 航太與系統工程所 === 100 === The shorted microstrip line method uses the one-port reflection coefficient S11 to measure the electromagnetic characteristics of magnetic thin films. Test samples should be positioned in the middle of the upper conductive strip and ground plate for better sensit...

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Bibliographic Details
Main Authors: Ming-Hung Weng, 翁明弘
Other Authors: Ruey-Bin Yang
Format: Others
Language:zh-TW
Published: 2012
Online Access:http://ndltd.ncl.edu.tw/handle/90046629064643490057
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Summary:碩士 === 逢甲大學 === 航太與系統工程所 === 100 === The shorted microstrip line method uses the one-port reflection coefficient S11 to measure the electromagnetic characteristics of magnetic thin films. Test samples should be positioned in the middle of the upper conductive strip and ground plate for better sensitivity. By adjusting the initial permeability at low frequencies, the frequency dependent complex permeability of thin magnetic films is determined from the S11 with and without a sample under test. This study also uses Ansoft HFSS to design the microstrip fixture and evaluate the accuracy of the shorted microstrip line method. In this study, the complex permeability of high permeability absorbing sheets (500μm) and Co-based thin films (110 nm) were measured in the frequency range of 1 ~ 5.5 GHz. The ferromagnetic resonance (RMR) frequency of the Co film can be obtained from the high frequency permeability spectrum. Compared to the cavity resonant perturbation method and the coaxial airline method, the shorted microstrip line method is suitable for the magnetic thin film fabricated on rigid dielectric substrates.