Experimental Study of Pressure Distribution and Bonding Strength of Microchannel

• Main Authors: Kuo-Hsien Hsin, 郭弦鑫
• Other Authors: Chyi-Yeou Soong
• Format: Others
• Language: zh-TW
• Published: 2012
• Online Access: http://ndltd.ncl.edu.tw/handle/75427866118482503062

碩士 === 逢甲大學 === 航太與系統工程所 === 100 === The purpose of this study is to investigate the bonding strength and the pressure distribution of micro-nano-channels made of different materials in non-cleanroom. To understand the tolerance of maximal pressure is useful in fabrication of microchannels. In this study, the working fluid is the DIUF water at the room temperature. The parallel-plate microchannels are of length 44.25mm, width 5mm, and high 59μm. The upper and the lower plates of the microchannel are PDMS (Polydimethylsiloxane) and glass in material. In order to compare the consequence generated from different material combinations, experimental models of glass-PDMS and PDMS-PDMS were used. Time for applying 100W oxygen plasma for surface characteristics modification before bonding is taken as one of the experimental parameters. Experimental results show that applying the oxygen plasma to the upper and lower plates of the microchannel before bonding may enhance the bonding strength. But the bonding strength is not proportional to the operating time of oxygen plasma. Effect of the operating time in the range of 25~30s is better than that of a longer time such as 60s. These results indicate that each surface has a certain loading limit. When the operating time of oxygen plasma is too long, the over-loading may cause aging and reduce the bonding strength. For the bonding of PDMS-glass, the recommended time for oxygen plasma surface modification is 25~30s; while for PDMS-PDMS model the recommended time is 7~11s.