| Summary: | 碩士 === 朝陽科技大學 === 環境工程與管理系碩士班 === 100 === Abstract
This study conducted field test for Local Scrubber in a Taichung semiconductor factory. The water quality data meet the original set specifications under average processing capacity of12 M3/hr. Ozone/UV/TSA-48-400 -> Ion Exchange is the processing program of operation mode, as well as optimal operation condition.
The bag micro-filter system consists of pre-filtration process and secondary filtration process. The suspended solids (SS) are removed to <1 mg/L when the filter bag is 25-10μm and 5-1μm. Ion Exchange system can process the electric conductivity and fluorion concentration to <50 µs/cm and <5 mg/L before or after advanced oxidation treatment. If the operation is suitable, the data are superior to the data required by water production. Besides, as compared to TOC removal rate, addition of TiO2 catalyst (TSA-48-400) can help advanced oxidation significantly improve TOC removal rate. By comparing TOC removal rate of advanced oxidation, addition of TiO2catalyst (TSA-48-400) can increase TOC removal rate from 17.8% to 29.6% when the program is designed to be AOPs ->Ion Exchange, and from 36.9% to 48.7% when the program is designed to be Ion Exchange ->AOPs. This is the merit of the operation mode of AOPs ->Ion Exchange. Taking Ozone/UV/TSA-48-400 -> Ion Exchange as an example, icon exchange can remove 39.5% of TOC, plus TOC removal rate of 29.6% by advanced oxidation, and the overall TOC removal rate can reach 69.1%. Organic acids produced from advanced oxidation are easily removed by resin anion exchange. TOC removal rate is higher than that using advanced oxidation.
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