| Summary: | 碩士 === 清雲科技大學 === 電子工程所 === 100 === In this paper, a novel carbon nanotubes (CNTs) sensor with devices structure and passivation method is fabricated on flexible substrate by a low-cost, water-based process. Secondary, we fabricate the flexible CNTs network sensor directly on the surface of the metal sensing probe. To complete this ideal, the CNTs organic thin film transistors (OTFTs) are fabricated on the Tungsten (W) plate and needle. First, we use the W plate as the substrate and this W substrate is used as the gate electrode. For the plastic substrate case, an additional Au gate electrode was formed on the plastic substrate. Then a unique Liquid Phase Deposition (LPD) silicon oxide was deposited as the gate insulator. Next, a metal layer was deposited and patterned as the source and drain electrodes. In order to forming the conduction channel in the sensor, the CNTs were dispersed in dimethylformamide (DMF) and spread between source and drain electrode as the channel layer and the device is completed. Besides the metal layers, all of the above soluble processes were completed by the water-based solvent. Based on the results of our sensor, the low limit of the ion concentration in the solution is uM level. Besides the OTFTs, the quality of oxide on the W substrate is monitored by a simple MIS structure with LPD silicon oxide. In our study, the suitable post - annealing temperature of LPD oxide on W is 600~700C. Finally, we also monitor the optical responses of the CNTs OTFTs on the W and Si substrates.
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