| Summary: | 碩士 === 中原大學 === 機械工程研究所 === 100 === In this study, we discuss the microbeam which are fixed in both ends, and use electric loading of the polarization voltage DC component and the AC component to actuated it. The viscous damping is considered in this microbeam structure. Then calculate the nonlinear natural frequency ratio , linear natural frequency ratio and dimensionless coefficient of the axial force to analyze. By using Hamilton's principle to derived the governing equation of motion , the parameters of influence are included in the model, then merge parameters into non dimensional parameters. After applying Galerkin's method, governing equation of motion is simplified into Mathieu equation with time variable. Finally the effect of the driving voltage and the amplitude on the frequency ratio is discussed and verified the results with the published theoretical and experimental results, then observe the pattern of vibration .
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