The study of innovative design and development of a high-precision variable-resolution micro machine tool, error analysis

• Main Authors: Yan-Hong Chen, 陳衍鴻
• Other Authors: Shih-Ming Wang
• Format: Others
• Language: zh-TW
• Published: 2012
• Online Access: http://ndltd.ncl.edu.tw/handle/42631043398341772637

碩士 === 中原大學 === 機械工程研究所 === 100 === The micro machine tool plays an important role in micro manufacturing, and the technology of Non-MEMS has become more and more important. In the study, present a new configuration design about a high-precision variable-resolution micro machine tool. To compare with toggle-type, new configuration has advantage of small table size and height, and slight variations in workspace’s resolution. For the optimal machine structure, modal analysis and dynamic compliance analysis were conducted with using CAE technology. The kinematic equation of the high-precision variable-resolution micro machine tool was derived and used to analyze the kinematic characteristics of the mechanism. Finally, the error model of the designed micro machine tool was derived and sensitivity analysis was conducted to explore the influence of the major error sources on machine’s accuracy.