Piezoelectric Power Generator Utilizing Nanowires

• Main Authors: Gu-Fu Wu, 吳家富
• Other Authors: Ming Chang
• Format: Others
• Language: zh-TW
• Published: 2012
• Online Access: http://ndltd.ncl.edu.tw/handle/46182874221748934563

碩士 === 中原大學 === 機械工程研究所 === 100 === In this study, oxidation auxiliary vapor-solid method is used for the growth of α-Fe3O4 nanowires on Fe-Ni alloy substrates, and also ZnO nanowires on zinc substrates. These parts were assembled to construct a nano-generator. Experiments were carried out with three combinations of piezoelectric substrates. A good and stable output was obtained with the combination that the substrate with the growth of α-Fe3O4 nanowires as the upper electrode and the growth of ZnO nanowires as the piezoelectric layer. Experimental result shows that the output voltage and current are 4.5×10-3 V and 5.8×10-7 A, respectively, under a constant compressive stress of 0.4 MPa. A buffer layer was added and assembled with the piezoelectric substrates, which was used to uniform the applied stress. This was proved with the simulation result from the commercial finite element package ANSYS. In addition, combined with the use of the rapid thermal annealing (RTA) process at 600°C, an increasing of 14 times of the output current was achieved. Furthermore, the power generating system produces a voltage of 9.6×10-3 V via series-connecting four piezoelectric substrates, and can enhance to 25 times of the output voltage with the assist of an external electrical circuit. Keywords: oxidation auxiliary vapor-solid method, nano generator, buffer layer, rapid thermal annealing