Hierarchical Selection Recognition for Wafer Map
碩士 === 中原大學 === 電子工程研究所 === 100 === Due to the challenge of analyzing extensive data of wafer maps, we construct a rule to identify defects on wafers for complete analysis. We propose two methods to solve this problem. For the seven common types of systematic errors on wafer maps, we use the values...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/79653794868002545219 |