| Summary: | 碩士 === 正修科技大學 === 機電工程研究所 === 100 === Due to the rise of biological and MEMS technology in recent years, some micro flow system components has been developed in sequence. The number of micro-pumps manufactured is higher than the other part of micro flow system since it is the power source of the entire micro-flow system and responsible for driving working fluid in the microfluidic system. In actual operation, the instability and poor dynamic characteristics of the micro-pump will cause larger fluid flow mobility error, transport behavior and response procedures failure, etc., and even damage the microfluidic system. Therefore, to investigate its stability and dynamic characteristics is necessary.
This study is to employ the miniature piezoelectric film micro-pump, made by "Microjet Technology Co., Ltd.," as the analytical foundation sample. Computer graphics software SolidWorks is used to build the model of the micro valve of the pump. The micro valve model is then exported to the finite element analysis (FEA) software ANSYS Workbench to analyze normal mode vibration, strength behavior of the valve structure. Analytical results is then compared with the experimental data of the micro valve at the maximum vibration amplitude. Fluid model of the chamber, thin film valve, inlet and outlet pipe of the micro-pump is constructed and analyzed by SolidWorks and ANSYS Fluent respectively. The variation of internal flow field and the flow line trajectory are obtained.
From the study, piezoelectric patch and the outlet thin film valve have consistent performance when the actuator is on. On the other hand, the instability phenomenon occurred and affected by the fluid when the valve is moving up and down during the operation. It is due to the vortex generated when the fluid passing through the membrane valve films.
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