| Summary: | 碩士 === 正修科技大學 === 電子工程研究所 === 100 === This study focuses on the electrical and optical properties of Al and Y codoped ZnO (AZOY) material transparent conductive thin film of the applied cadmium telluride solar cell window layer.
The discuss respect to the properties of AZOY thin films and the change of thickness (20 nm-220 nm), laser frequency (2 Hz-10 Hz) and annealing temperature (300 oC-500 oC) deposited on ITO substrate by pulsed laser deposition. Using the Hall Measurement to measure the electrical property, the UV/VIS Spectrophotometer to measure the transmittance and the X-ray to analyze the structure.
According to the results of experiments, thickness variation in film thickness of 170 nm, laser frequency of 10 Hz and annealing temperature of 400 oC has the best optical and electrical properties. The best quality of AZOY thin films showed high average visible transmittance 81%with TIO substrate, the lowest resistivity of 4.9x10-4 Ω-cm, the highest mobility of 15.5 cm2/Vs, and the highest carrier concentration of 8.1x1020 cm-3.
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