| Summary: | 碩士 === 元智大學 === 機械工程學系 === 99 === Temperature, flow and pressure are critical parameters which affect fuel cell performance such as potential, current and power density. Therefore, monitoring non-uniform temperature/flow rate/pressure inside a proton exchange membrane fuel cell (PEMFC) is an essential issue.
In order to avoid performance of PEMFC decreasing, this research reduces the size of sensors to μm scale by Micro-Electro-Mechanical System (MEMS). Therefore, non-invasive measurement inside a PEMFC is verified. This research work is mainly divided to two parts: 1. Fabrication process of flexible micro sensors on a stainless steel substrate by MEMS; 2. Embedding sensors into a PEMFC, and monitoring local temperature/flow rate/ pressure of PEMFC and cell performance.
The integrated flexible micro sensors were fabricated successfully. Sensors were embedded into a PEMFC to measure local pressure, temperature, and flow rate. Temperatures of upstream and downstream of the PEMFC are 64.8 °C and 64.7°C (RH50%; 0.1 A/cm2); 62.7 °C and 64.3°C (RH100%; 0.1 A/cm2). The temperature difference between thermal couple and sensor is 0.8°C. Temperature of upstream and downstream is 66.2 °C and 62°C (RH50%; 1 A/cm2). The maximum difference is 4.2°C.
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