Fabrication of blazed grating applied on stereoscopic display by using reactive ion etching

• Main Authors: Yao-Ru Chang, 張耀儒
• Other Authors: Chien-Yue Chen
• Format: Others
• Language: zh-TW
• Published: 2011
• Online Access: http://ndltd.ncl.edu.tw/handle/01283060610875160034

碩士 === 國立雲林科技大學 === 光學電子工程研究所 === 99 === We demonstrated a newly developed stereoscopic technique which applied a blazed grating as a diffraction optical element in an auto-stereoscopic system. The great advantage of the traditional parallel barrier replacement by the blazing grating is luminance efficiency improvement. We need to understand the lithographic process limitations, the geometric dimension of each pixel in the display panel and the encountered material refractive indices before the grating design. The software package called G-solver was used to simulate the diffraction efficiency. Finally, the 4- level phase was adopted to produce the blazing grating because of the balance between the process difficulty and luminance efficiency. We produced the gratings on the silicon substrate and evaluated the efficiency experimentally. The efficiency achieved is measured to be 70.6% which approaches to the simulation value of 79.0% in the 4-level phase blazing grating.