A Study of Passivation for Crystalline Silicon Solar Cell by Radio Frequency Magnetron Sputtering
碩士 === 國立雲林科技大學 === 光學電子工程研究所 === 99 === In this study we focus on the fabrication of solar cell device by Radio Frequency Magnetron Sputtering, as well as the passivation effect of hydrogen plasma and intrinsic thin films. First we determined the optimized parameter of Electrode which is Hf(90...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/20281913805913376317 |