Effect of O2/N2 Ratio on Characteristics of Cathodic Arc-deposited Ti-O-N Composite Films on AISI 304 Stainless Steel

• Main Authors: Ya-huei Lin, 林雅惠
• Other Authors: Cheng-hsun Hsu
• Format: Others
• Language: zh-TW
• Published: 2011
• Online Access: http://ndltd.ncl.edu.tw/handle/77464633733211477057

碩士 === 大同大學 === 材料工程學系(所) === 99 === In this study, the TiN coating and TiON composite coatings were synthesized on AISI 304 stainless steel substrate by cathodic arc deposotion (CAD) system using different flow-rate of N2 and O2 reactive gases and Titanium (99.9 wt%) target. Then the coating morphologies and properties such as roughness, chemical composition, structure, and adhesion were all analyzed. Moreover, wear tests, polarization tests, and immersion tests were also performed for exploring the effect of O2/N2 flow-rate ratio on the wear and corrosion behavior for coated AISI 304 stainless steel. The experiment results showed that the TiON composite coatings mainly consist of a mixture of TiN and TiO2-Anatase phases. When the O2/N2 flow-rate ratio is set at 1/4 (O2：17 sccm，N2：68 sccm), the TiON coatings obtained have a dense structure, smallest surface roughness (Rq value = 0.261 μm ), and the best adhesion (HF1). In wear resistance, the TiON coatings have a lowest friction coefficient (0.428) when the O2/N2 ratio is set at 1/4 to get the highest H/E value. Moreover, the optimum coatings have better corrosion resistance in 3.5 wt% NaCl and 10 vol% HCl solutions, respectively.