| Summary: | 碩士 === 淡江大學 === 機械與機電工程學系碩士班 === 99 === Currently the global measurement technology in meso-scale three-dimensional topographyencountered a bottleneck, which lies in the design and manufacture of the probe type of the probing sensor. With the progress of science and technology, the need of meso-scale components with their feature size ranging from micrometers to millimeters rapidly increase. The demand for measurement accuracy has reached the nanometer level even more. Over the past decade, the world’s major countries, cooperated with world-renowned research organizations and companies to carry out a number of research work related to the probing sensors, but there is not any great breakthrough. The main reason is that most of the proposed methods have low sensitivities, large contact forces and large probe diameters. In this study, a optical sensing technique of fiber probing head with high sensitivity is proposed. It does not have the foregoing shortcomings. Besides, it adopts fiber Bragg grating principle and optical interferometry. It can ensure the fiber probing head outputs the touch-trigger signal within nanometer scale displacement. It is likely to be able to break through the current global bottlenecks in measurement technology.
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