| Summary: | 碩士 === 淡江大學 === 機械與機電工程學系碩士班 === 99 === This paper proposed based on the concept of symmetry in the microscopic size of damage under the drive of the development of the liquid. Part of the design element in the drive cavity and silicon micro flow channel, and five different types of rotor, followed by adding the natural frequency of the theoretical material and ANSYS finite element analysis conducted on the rotor design analysis simulation, and explore different types of conditions the rotor, drive for drive performance liquid effect, to obtain the best operating results. Process on silicon wafers using wet etching of silicon wafer technology for anisotropic etching, convex corner compensation and join the design to fix the silicon wafer of the central axis, the rotor is the use of SU-8 thick photoresist, use its high aspect ratio of the features made. Finally, the PDMS to oxygen plasma surface modification and Bonding silicon wafer substrate to complete the fluid drive structure. By the experimental results revealed that the use of 3 leaves, 4 leaves and 5 leaf blade rotor can be driven to the final measurement results showed that when 3 leaves, 4 leaves and 5 leaves of liquid water into the drive of the individual in 2.44 ml/min, 3.5 ml/min and 4.75 ml/min beginning when the rotor turn again into the water 2.4 ml/min, 3.38 ml/min and 4.72 ml/min stop rotation, forming a hysteresis. Finally, the ANSYS simulation results calculated by the Reynolds number with which to compare the literature and found that its Reynolds number is less than 400 in the movable range of the following.
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