An Ultra-Small Wankle Engine Made by MEMS Process

• Main Authors: Tsan-Hsiang Wang, 王贊翔
• Other Authors: Lung-Jieh Yang
• Format: Others
• Language: zh-TW
• Published: 2011
• Online Access: http://ndltd.ncl.edu.tw/handle/28715922544196089640

碩士 === 淡江大學 === 機械與機電工程學系碩士班 === 99 === The purpose of this study will present a novel concept of design and fabrications of an ultra-small engine, the configuration refer to Wankel engine. The engine operates with the temperature difference which refers to the concept of Stirling engine. There are three size have been 20 mm × 14 mm, 10 mm × 7 mm, and 5 mm × 3.5 mm. Through theoretical analysis, compare the internal fluid thermal conductivity as the housings were made of silicon substrate and the PDMS substrate. The author found as the substrate is made of PDMS, the heat transfer coefficient of the internal fluid just bigger than 0.015. So the present study applied the PDMA as the substrate material. An advanced UV-lithography process has been developed, which can produce ultra thickness components of the ultra-small engine. The main detail MEMS processes contain the photo lithography and inductively coupled plasma etching the silicon wafer as a mold of housing, the mold of housing can reuse to reduce costs. The production of SU-8 thick photoresist structure of the rotor, design and fabricate the electrodes be the sensors or actuators. Finally, make use of oxygen plasma surface-modified, bonding the PDMS and Pryex 7740. To prevent leakage the engine was coated with parylene and successful product the micro Wankel engine. To the testing stage, the author applied ultrasonic cleaning machines to test the rotor without sticking to the surface of PDMS or Pyrex 7740. To the heating electrodes and heating ceramic plate be the heat source, testing the heat source whether changes in fluid density and temperature difference driven the rotor.