The study of an innovative locally balanced air circulation system in industrial cleanrooms

• Main Authors: Ti Lin, 林迪
• Other Authors: 胡石政
• Format: Others
• Language: en_US
• Published: 2011
• Online Access: http://ndltd.ncl.edu.tw/handle/ha6qbr

博士 === 國立臺北科技大學 === 機電科技研究所 === 99 === A wall-return ventilation system, containing ceiling-supply and wall-return air grilles, is traditionally applied in non-unidirectional airflow cleanrooms with ISO cleanliness level of 6 to 8. In such a wall-return cleanroom, the pathways of return airflow toward the wall-return grilles may be affected by locations and layouts of the production lines and tool equipment. Especially, the need for re-relocating production lines and rearrangement of tool equipment in the industrial cleanrooms should be considered. This study proposed a fan dry coil unit (FDCU) return system, containing ceiling supply and ceiling-return air grilles, and conducted experimental works in a full-scale cleanroom to investigate the performance of the innovative and traditional ventilation systems. The influences of air change rates and supply air plenum pressures on the removal of 0.1 μm particles were examined in the experiment. The FDCU-return ventilation arrangement may provide viable solutions to achieve effective contamination control. The results show that the innovative FDCU-return system can effectively eliminate at least 49% of 0.1 μm particles from the cleanrooms more than the conventional wall return system. Moreover, the outcomes from this study suggested that particle removal rates for the given cleanrooms were significantly affected by air change rates. This study further investigated the effect of the heat dissipation from the tools on airflow characteristics and temperature distribution in the FDCU-return and wall-return airflow type cleanrooms. Comparisons of air flow pattern and temperature distribution between the FDCU-return air system and the conventional wall-return air system are presented. It is concluded that the FDCU-return air system can significantly provide better air motion characteristics and temperature distributions in high heat source cases in comparison with those of the wall-return air system.