XRD analysis of InN films grown on different buffer layers and substrates
碩士 === 國立臺北科技大學 === 資源工程研究所 === 99 === In this thesis, we study the effect of annealing temperature, substrate/buffer layers and ion doping on crystal qualities and strain of indium nitride（InN）thin films by x-ray diffraction (XRD). InN thin films were grown sapphire and silicon substrates by hetero...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/cs6p2s |