Synthesis of Vertically Oriented Silicon Nanorods by Plasma Chemical Vapor Deposition
碩士 === 東海大學 === 物理學系 === 99 === Hot wire chemical vapor deposition (HW-CVD) is facing three major difficulties in nanorod growth even though it is successfully grown Si nanorods on amorphous substrates. (1) The reproducibility is highly affected by the aging of the hot filament. (2) Material quality...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/81589709398285750118 |