| Summary: | 碩士 === 聖約翰科技大學 === 自動化及機電整合研究所 === 99 === With advances in technology present trend of the times, the market for mobile phone screens, LCD TVs and other related displays, as these materials are glass substrates, but for convenience of the future, people are asked to change the product lightweight, thinner even easy to carry rolled up. So gradually the use of soft plastic as the substrate, such change will become a new trend and choice. Therefore, this study was to investigate the RF radio frequency sputtering deposition of transparent conductive ITO (Indium tin oxide) thin film on PET (Polyethylene Terephthalate) plastic substrate, and the implementation of the surface of CO2 laser annealing processing. Because the soft PET and glass substrates under comparison will be significant differences, such as heat also can not be compared with glass, plastic substrates and differences in thermal expansion coefficient of ITO thin film thermal stress can cause problems, so when the sputtering ITO film surface cracks caused by the phenomenon. To avoid this, the paper by RF sputtering and laser annealing technology to be indium tin oxide films on flexible polyethylene terephthalate substrate surface, change the radio frequency sputtering attack rate (40 W, 50 W, 60 W) deposited at different film thickness (100 nm, 150 nm, 200 nm, 250 nm), and at different feed rate (150 mm / s, 200 mm / s) for laser annealing of different process parameters produced specimens, their optical properties, preferred orientation, crystal structure and mechanical properties and other characteristics. By PL spectroscopy, four-point probe electrical group, X-ray diffraction, 3D surface profile measurement of the impact of shift.
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