| Summary: | 碩士 === 國立虎尾科技大學 === 機械與機電工程研究所 === 99 === Dip-pen nanolithography (DPN) has been proven to be a useful tool for the direct writing of diverse nanopatterns on substrates. In DPN, an atomic force microscope (AFM) tip is used to deliver desired molecules, such as self-assembled monolayers (SAMs). The tip is used as a nanoscale pen, allowing high-resolution patterning with a number of molecular inks on a variety of substrates. DPN with a single probe tip can arbitrarily create patterns with high resolution and registration, but its throughput is limited. Therefore, a DPN array technique is developed in this study.
In this study, the Effects of the type of probe tip, distance between probe tips, deposition temperature, probe tip velocity, probe tip radius, and humidity on the SAMs transfer process are evaluated in terms of molecular transference, alkanethiol meniscus characteristics, surface adsorption energy, surface adsorption force, number of transferred chains, diffusion coefficient, and pattern characteristics.
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