Control Of A Six-Degrees-Of-Freedom Nanomeasuring Machine
碩士 === 國立虎尾科技大學 === 自動化工程研究所 === 99 === The purpose of this paper is focusing on the integration of six-degrees-of-freedom nanomeasuring machine stage controller, including the assembly and improving of the stage. We then and combines this stage with six-degrees-of-freedom error measuring system for...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/rv6vph |